PBT-390 On-line plasma cleaning machine
The process flow：
Feed port automatic feeding - load plate reading - plasma cleaning - discharge port automatic feeding/caching.
Suitable for all kinds of camera module, wafer precision cleaning.
Characteristics of the equipment：
? The equipment is suitable for production through connection with the customer's upper and lower work stations and automatic loading and unloading of the equipment for separate production;
? The equipment frame and shell are made of double mirror SUS304 stainless steel sheet metal to meet the requirements of grade 100 workshop;
? The operating height of the equipment is 950mm, and the adjusting height of the foot cup is 950±50mm;
? The cleaning machine is composed of a conveyor track, a reading component (reserved for MES system docking), a plasma cleaning component, and a cache horizontal group;